To be a magnetic seal that covers a wide range of specifications

A wide range of specifications and processing methods are used in etching systems, including those for active gases, high temperatures, high-speed rotations, plasmas, electrodes, ion beams, strong magnetic fields, and leakage magnetic fluxes. Although it has been considered that these methods cannot be achieved by conventional magnetic seals, we have been tackling new challenges with the aim of covering all of these areas with Rigaku’s magnetic seals.